Fabrication of in-plane aligned a-axis oriented
YB2Cu3O7-x
trilayer Josephson Junctions

In spite of fabrication difficulties compared to other types of junctions, vertical geometry YB2Cu3O7-x (YBCO) Josephson junctions are attractive for a number of reasons. Vertical trilayers offer a straightforward geometry that is ideal for peripheral circuits. There is a clearly defined junction area unlike in edge junctions, and in principle, epitaxial barrier layers of fixed thicknesses guarantee good control of junction parameters. The Tc's of the device electrodes are typically greater than 80K


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