Pulsed Laser Ablation Deposition

Schematic of a typical PLAD system.

In the PLAD technique, a laser beam (most frequently an excimer laser) is directed at a solid target. The interaction of the pulsed laser beam with the target produces a plume of material that is transported toward a heated substrate placed directly in the line of the plume. Multiple targets can be loaded inside the chamber on a rotating holder, which can be used to sequentially expose different targets to the laser beam, thereby enabling the in-situ growth of heterostructures and superlattices with relatively clean interfaces.

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