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ThinFilmProcessing
Ion Mill – Room 0103 - User Facility

IonMill

Super-user: Doug Bensen, dbensen@umd.edu, x57650
Supervisor: Prof Ichiro Takeuchi, takeuchi@squid.umd.edu, x56809

Plasma REI etcher – Room 0219 – User facility

Plasma

Super-user: Brian Straughn, straughn@umd.edu, x56131
Supervisor: Prof Steve Anlage, anlage@squid.umd.edu, x57321


Center for Nanophysics and Advanced Materials
University of Maryland
College Park, MD 20742-4111
Phone: 301.405.6129 Fax: 301.405.3779
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