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Photolithography

Cleanroom - Room 0205C

Cleanroom

Class 100 cleanroom with facilities for spinning, exposing and developing positive photoresist and wirebonding samples

Super-user: Brian Straughn, straughn@umd.edu, x56131
Supervisors: Prof Michael Fuhrer, mfuhrer@physics.umd.edu, 56143 and Prof Chris Lobb, lobb@squid.umd.edu, 56130

Masker Aligner -  Room 0205c

MaskAligner

Super-user: Brian Straughn, straughn@umd.edu, x56131
Supervisor: Prof Chris Lobb, lobb@squid.umd.edu, 56130

Wirebonder – Room 0205c

wirebonder

Super-user: Hanhee Paik
Supervisor: Prof Chris Lobb, lobb@squid.umd.edu, 56130


Center for Nanophysics and Advanced Materials
University of Maryland
College Park, MD 20742-4111
Phone: 301.405.6129 Fax: 301.405.3779
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