Anlage Research Group

High Frequency Superconductivity, Microscopy, Nanophysics, and Chaos


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UM NanoScience Center

Physics Department

ECE Department

Nanometer Resolution Microwave Microscopes

We have pushed the limits of quantitative near-field microwave microscopy to nanometer spatial resolution. In a series of papers we have examined the features of our near-field microscopes that dictate the spatial resolution (papers 89, 91, 112). We have also demonstrated lateral resolution of better than 100 nm for capacitance contrast (papers 103, 117). The microscopes have also demonstrated broad bandwidth, allowing for combined dielectric microscopy and spectroscopy (paper 118).

This work is supported by the National Science Foundation and the Maryland Center for Nanophysics and Advanced Materials.

Some relevant papers: (All papers can be downloaded from the full publication list)

89. Atif Imtiaz and Steven M. Anlage, A novel Microwave Frequency Scanning Capacitance Microscope, Ultramicroscopy 94, 209-216 (2003) . pdf

91. Alexander Tselev and Steven M. Anlage, Hans Christen, Robert L. Moreland, Vladimir V. Talanov, and Andrew R. Schwartz, Near-Field Microwave Microscope with Improved Sensitivity and Spatial Resolution Rev. Sci. Inst. 74, 3167-3170 (2003). pdf

103. Atif Imtiaz , Marc Pollak , Steven M. Anlage, John D. Barry and John Melngailis, Near-field microwave microscopy on nanometer length scales, J. Appl. Phys. 97 , 044302  (2005). pdf

112. Atif Imtiaz , and Steven M. Anlage, Effect of tip-geometry on contrast and spatial-resolution of the near-field microwave microscope, J. Appl. Phys. 100 , 044304 (2006). pdf

117. Atif Imtiaz , Steven M. Anlage, John D. Barry and John Melngailis, Nanometer-Scale Material Contrast Imaging with a Near-Field Microwave Microscope, Appl. Phys. Lett. 90 , 143106 (2007). pdf

118. Alexander Tselev, Steven M. Anlage, Zhengkun Ma, John Melngailis , and R. Ramesh, Broadband dielectric microwave microscopy on micron length scales, Rev. Sci. Instrum. 78 , 044701 (2007). pdf

Center for Nanophysics and Advanced Materials, University of Maryland, College Park, MD 20742-4111
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