Three Excimer lasers and 10 PLD chambers (each with a target holder and  substrate heater/holder, pumps, etc.)

Super-user: Dr. R. D. Vispute, vispute@squid.umd.edu, x55992 and Dr Kui Jin, kuijin@umd.edu, x57943

Supervisor: Dr. Ichiro Takeuchi, takeuchi@umd.edu, X56809